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CVD Reactor 915MHZ
915MHZ Microwave Plasma
CVD Reactor Optimized for
Single Crystal Diamond Growth
Chemical Vapor Deposition
Type IIA Monocrystalline &
Polycrystalline Diamonds
Medical Applications
- Scalpels - Eye Surgery and Laser Based Coagulation
- Knives - Ultramicrotome
- Ultraprecision tool for milling Intraocular Lenses
- Pharmaceutical - Water Purification
- Ramen Laser - Window
- CO2 Laser - Window
- Radiation Dosimetry
- Sensor for Magnetocardiography
- Fluorescence Imaging
- Medical Grade Nano Diamonds
- Prosthetic Limbs Coating
- Water Purification - Disinfection in Multi Stages
(Refractory Chemicals Electrodes)
Optics
- Laser windows
- Infrared windows
- Lenses
- X-ray windows
- ATR units
Industrial
- Oil and gas drill bits
- Precision machining
- Wear resistance
- Wood Machining
- Grinding and Polishing
- General Engineering
- Road Maintenance
- Stone and Concreate Processing
- Mining, Tunneling and Drilling
- Diamond Composite Materials for Industrial Use
Semiconductors
- Radar
- Communication Satellites
- Diodes
- Switches
- Ultra Pure CVD utilizing nitrogen vacancies for Quantum Computing Devices
- Cellular Communications Towers
- RF Amplifiers
Semiconductors
- Radar
- Communication Satellites
Optics
- Laser windows
- Infrared windows
- Lenses
- X-ray windows
- ATR units
Thermal
- Heat spreaders
- Laser sub mount
- X-ray sub mount
Industrial
- Oil and gas drill bits
- Precision machining
- Wear resistance
Water Purification
- Electrodes for water purification
Sensors
- Radiation Sensors
- Fluorescence beam monitors
- Ionizing radiation detectors
Quantum Computing
- For faster data processing and secure communication
Medical
- Radiation detectors for eye cancer therapy
- Surgical scalpel
- Medical Grade Nano Diamonds
| 915MHZ CVD REACTOR | ||||||||
|---|---|---|---|---|---|---|---|---|
| Chamber | Reactor Chamber Type | Cylinder | Material | AI/SS | Vacuum Seals | Viton, Silicone | Water cooling walls | yes |
| Vacuum System | Typical Operation Pressure range, Torr | 1-30kPa | Base Pressure, Torr | 10-200 | Vacuum Leak Integrity, Torr/sec | <3*10^-5 | Vacuum Type pump | Hydrocarbon |
| Vacuum filter | Yes | Turbo Vac | Optional | |||||
| Microwave Generator | Microwave frequency | 915MHz | Microwave Output Power | 3-25KW | Impedance matching (tuner type, automatic, etc.) | Manual | Protection | Yes |
| Reflected power microwave detector | Yes | Water cooling | Required | |||||
| Substrate Stage | Substrate material | Moly | Stage Material | SS | Cooled | Water Cooled | Heated | No |
| Stage Size | 85mm - 230mm | Substrate Holder | Moly | Deposition Area | 100mm-200mm | Manual change the height | Manual | |
| Auto Z-axis motion | Recipe Driven | |||||||
| Process Gases | #1, H2 sscm ? | 2000 or User Select | #2, CH4 sscm ? | 400 or User Select | #3, ?? | User Select | #4 | User Select |
| Purge port | Yes | Mass Flow Regulators | 4(Standard) or More Optional | |||||
| Cooling system | Cooling type | Water | Water type | Distilled | Temperature of Cooling Water | Above dew point | ||
| Electronic & Software | Screen | Touchscreen | UPS | Optional | Auto recipe-driven control system with run-based data collection and safety interlocks | Yes | Additional software, process control, etc. | Remote monitoring/control |
| The power supply system | Emergency Stop Button | Yes | ||||||
| Control Temperature | Pyrometre | 1 | ||||||
| Growth rate | For Single Crystalline Diamond | 10 to 30 Micron | ||||||
| OPTIONS | Motor driven Z with High precision stepper motor | yes | H2 generator | On Request | H2 palladium purifier | On Request | DI water Purifier | On Request |